发明名称 |
Capacitive Sensors and Methods for Forming the Same |
摘要 |
A device includes a semiconductor substrate, and a capacitive sensor having a back-plate, wherein the back-plate forms a first capacitor plate of the capacitive sensor. The back-plate is a portion of the semiconductor substrate. A conductive membrane is spaced apart from the semiconductor substrate by an air-gap. A capacitance of the capacitive sensor is configured to change in response to a movement of the polysilicon membrane.
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申请公布号 |
US2013277771(A1) |
申请公布日期 |
2013.10.24 |
申请号 |
US201213452037 |
申请日期 |
2012.04.20 |
申请人 |
CHOU BRUCE C.S.;TU JUNG-KUO;FAN CHEN-CHIH;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHOU BRUCE C.S.;TU JUNG-KUO;FAN CHEN-CHIH |
分类号 |
H01L29/84;H01L21/02 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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