发明名称 SHAPE PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To solve the problem in which: it is difficult to obtain high processing accuracy because conventional shape processing methods do not consider a change in a removal amount profile.SOLUTION: There is provided a shape processing method comprising a step 1 of determining a plurality of removal amount profiles having operation conditions of a processing tool as a variable and a step 2 of calculating scanning conditions from the plurality of removal amount profiles and a set processing amount. This method provides high-accuracy shape processing because it calculates the scanning conditions in consideration of a change in the removal amount profile being processed.
申请公布号 JP2013219106(A) 申请公布日期 2013.10.24
申请号 JP20120086391 申请日期 2012.04.05
申请人 CANON INC 发明人 FUKUMIYA YOICHI;FUNABASHI KATSUHIRO;KAMAIKE YASUSHI
分类号 H01L21/3065;H05H1/00 主分类号 H01L21/3065
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