| 摘要 |
PROBLEM TO BE SOLVED: To generate sufficient thermal stress by heating a glass film whose thickness is 200 μm or smaller by laser and cooling the same thereafter to form a suitable a scribe line.SOLUTION: In a lamination body manufacturing method, the surface roughness Ra of the surfaces 1a and 2a is made to be 2.0 nm or smaller, which are sides that come into contact with each other of a glass film 1 whose thickness is 200 μm or smaller and supporting glass 2 for supporting it, respectively, and a glass film lamination body 3 is manufactured by making both surfaces 1a and 2a being subjected to surface contact. Then, a laser scribe process is performed in which initial cracks are developed by heating the glass film 1 by laser and cooling the same thereafter and scribe lines 17 are formed. |
