发明名称 Method for permanently connecting two metal surfaces
摘要 The method involves processing metal surfaces of two respective substrates by production of adjacent-surface layers with defects. The adjacent-surface layers are produced by implanting ions of gas and/or deposition of an inferior metal layer and/or application of metallic nanoparticles. A permanent, electrically conductive connection is produced predominantly by substitution diffusion between metal ions and/or metal atoms of the metal surfaces during a connection of the metal surfaces. The metal surfaces are oriented and connected at maximum process temperature of 300 degree Celsius.
申请公布号 EP2654074(A2) 申请公布日期 2013.10.23
申请号 EP20130175455 申请日期 2010.03.31
申请人 EV GROUP E. THALLNER GMBH 发明人 WIMPLINGER, MARKUS;DRAGOI, VIOREL
分类号 H01L21/60;H01L23/00;H01L25/00;H01L25/065 主分类号 H01L21/60
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