| 摘要 |
<p>PURPOSE: An MEMS driving device is provided to improve improved performance, to reduce costs, and to reduce energy consumption. CONSTITUTION: An MEMS driving device (307) includes a first inputting device, a second inputting device, and an amplifier (309) The first inputting device receives first command signals including vibration command signals. The second inputting device receives second command signals including bias command signals. The amplifier receives a high voltage supply. The amplifier provides closed loop output signals responding to both the first and second command signals to an MEMS device in the first state and provides opened loop output signals spreading through the whole voltage range of the high voltage supply in the second state. [Reference numerals] (AA) Analogue/digital profit control; (BB) High voltage multiplier; (CC) HV motor; (DD) MEMS sensor</p> |
