发明名称 Semiconductor device with vertical channel over buried bit line
摘要 A semiconductor device and a method for manufacturing the same are provided. The method includes forming a cell structure where a storage node contact is coupled to a silicon layer formed over a gate, thereby simplifying the manufacturing process of the device. The semiconductor device includes a bit line buried in a semiconductor substrate; a plurality of gates disposed over the semiconductor substrate buried with the bit line; a first plug disposed in a lower portion between the gates and coupled to the bit line; a silicon layer disposed on the upper portion and sidewalls of the gate; and a second plug coupled to the silicon layer disposed over the gate.
申请公布号 US8564056(B2) 申请公布日期 2013.10.22
申请号 US201313734698 申请日期 2013.01.04
申请人 SK HYNIX INC. 发明人 PARK HYUNG JIN
分类号 H01L29/772;H01L21/336 主分类号 H01L29/772
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