| 发明名称 |
System and method for compensating detector non-idealities |
| 摘要 |
Compensating for imperfections in electromagnetic radiation detectors, and more particularly to a system and method for compensating for polarization state sensitivity and/or beam non-uniformity or the like with application in spectroscopic ellipsometers and polarimeters. |
| 申请公布号 |
US8564777(B1) |
申请公布日期 |
2013.10.22 |
| 申请号 |
US201113136839 |
申请日期 |
2011.08.13 |
| 申请人 |
HERZINGER CRAIG M;J.A. WOOLLAM CO., INC. |
发明人 |
HERZINGER CRAIG M |
| 分类号 |
G01J4/00 |
主分类号 |
G01J4/00 |
| 代理机构 |
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代理人 |
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