ADJUSTABLE INDUCTOR, IMPEDANCE MATCHING APPARATUS AND SUBSTRATE TREAING APPARATUS WITH THE SAME

摘要

PURPOSE: A variable inductor, an impedance matching device including the same, and a circuit board processing device are provided to minutely control the induction capacity of a variable inductor by controlling a switch connected to each unit of an inductor coil. CONSTITUTION: A circuit board processing device (100) includes a high frequency power source (1000), a transmission line (1100), a process chamber (2000), and an impedance matching device (3000). The process chamber includes a plasma generator (2200). The plasma generator provides plasma to the processing chamber. The high frequency power source outputs the high frequency power. The transmission line transmits the high frequency power to the processing chamber. The impedance matching device includes a variable inductor provided to the transmission line. The variable inductor includes a plurality of switches connected from the core shaft of the inductor coil to a different direction and is controlled according to the inductor coil and the control signal. The variable inductor controls the inductivity according to the control state of the switches. [Reference numerals] (1000) High frequency power source; (3100) Impedance measuring instrument; (3200) Reflection electricity measuring instrument; (3300) Controller; (3400) Matcher; (AA) Plasma