ELECTRON BEAM IRRADIATOR PROVIDED WITH STRUCTURE FOR REDUCING VIBRATION

摘要

PURPOSE: An electronic beam emitting device having a vibration reduction structure is provided to completely block a vibration by secondarily reducing the vibration delivered to a chamber by a bellows. CONSTITUTION: A chamber is installed in a basic frame. A vacuum generating unit (150) provides vacuum pressure into the chamber. A pump support unit (140) supports the vacuum generating unit. A vibration absorbing unit is installed in the basic frame. The vibration absorbing unit absorbs a vibration of the vacuum generating unit.