| 摘要 |
PROBLEM TO BE SOLVED: To prevent a variation of the sealing finish of each seal device according to a situation of a heater wire of the seal device, and to perform stable sealing.SOLUTION: A plurality of vacuum chambers 51 are mounted around a vacuum table 12, and seal devices are installed in the vacuum chambers 51. A heater wire 56 is installed in each of heater devices of the seal devices. A heater wire energization time change means capable of setting an energization time corresponding to a state of each heater wire 56 is installed. The heater wire energization time change means includes: a storage medium 38C storing the energization time to the heater wires; a change means for rewriting and changing a memory stored in the storage medium 38C; and an output control part 37F performing operation so that an electric current flows in the heater wires 56 in accordance with the energization time to the heater wires 56 stored in the storage medium 38C. |
