| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermoelectric characteristic measurement device that is capable of flexibly changing positions of two measurement points of a specimen and a distance therebetween.SOLUTION: Probe units 61 and 63 are moved in a vertical direction independently of each other. As a result, it becomes possible to flexibly change a position of a tip end portion 65 of the probe unit 61 and a position of a tip end portion 67 of the probe unit 63 in the vertical direction independently of each other. It is also possible to bring the probe units into contact with the measurement points of the specimen 3 so as to be energized toward the measurement points, thereby stabilizing contact positions. |
