发明名称 Methods Using Block Co-Polymer Self-Assembly for Sub-Lithographic Patterning
摘要 Block copolymers can be self-assembled and used in methods as described herein for sub-lithographic patterning, for example. The block copolymers can be diblock copolymers, triblock copolymers, multiblock copolymers, or combinations thereof. Such methods can be useful for making devices that include, for example, sub-lithographic conductive lines.
申请公布号 US2013270226(A1) 申请公布日期 2013.10.17
申请号 US201313912800 申请日期 2013.06.07
申请人 MICRON TECHNOLOGY, INC. 发明人 MILLWARD DAN
分类号 C23F1/02;B05D3/00;B05D5/00 主分类号 C23F1/02
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