PHOTOSENSITIVE RESIN COMPOSITION COMPRISING ORGANOPOLYSILOXANE

摘要

PURPOSE: A photosensitive resin composition is provided to form a uniform and stable coated film when coated on a substrate, to generate no stain such as resin stain and cumulus stain, and to facilitate the pattern formation. CONSTITUTION: A photosensitive resin composition comprises a) an organic siloxane polymer including a siloxane unit having at least one functional group selected from the group consisting of oxetane, epoxy, hydroxy and thiol; b) an acrylate compound having at least one ethylenic unsaturated double bond; c) a polymer or an oligomer including at least one epoxy (however, it is different from a) organic siloxane polymer); and D) an acid generator.