| 摘要 |
PURPOSE: A thin film manufacturing apparatus with a heater is provided to maintain a constant temperature during heat treatment, thereby redeeming temperature drop according to precursor droplet jet. CONSTITUTION: A thin film manufacturing apparatus with a heater manufactures a thin film with one method among a spray coating method, an ultrasound spray coating method and an ultrasound spray method. The thin film manufacturing apparatus with a heater comprises the following: a heat delivery plate (2) in which a substrate (3) can be located at a top and predetermined thermal energy is transmitted to the substrate; a heater (4) which is mounted at the lower part of the heat delivery plate and generates the thermal energy; a droplet jet unit which is located at the upper part of the heat delivery plate and jets precursor droplets in order to coat the substrate with the precursor droplets; a height adjuster (5) which controls a height of a droplet jet section between the droplet jet unit and the heat delivery plate; and exhausting units (6,7,8) which are positioned at the upper part of the droplet jet unit and inhale unreacted flying droplets among the emitted precursor droplets. |
