SIOX NANOPARTICLE MANUFACTURING APPARATUS INCLUDING CRUCIBLE FOR SILICON MELTING HAVING SLIDING TYPE TAPPING STRUCTURE AND MANUFACTURIGN METHOD OF SIOX NANO PARTICLE USING THE SAME

摘要

PURPOSE: A SiOx nanopowder manufacturing apparatus and a SiOx nanopowder manufacturing method using the same are provided to manufacture a SiOx nanopowder having a 50nm particle size with high purity at low cost in short time and to prevent silicone molten metal from being solidified on the bottom surface of a melting pot. CONSTITUTION: A method for manufacturing SiOx nanopowder comprises steps of: a step(S210) of charging silicone inside a silicone melting crucible; a step(S220) of forming a silicone molten metal through an inductive heating process; a step(S230) of spraying gas to directly contact the surface of the silicone molten metal; a step(S240)of collecting SiOx particles through cooling and condensing SiOx vapors which become volatilized in the reaction between the silicone molten metal and the sprayed gas; and a step(S250) of pulling out an opening and closing bar for tapping which is slide-inserted and cleaning the bar. While the grip protrusion of the opening and closing bar for tapping is gripped by a gripper, the opening and closing bar for tapping is ejected outside the tapping container. Both side surfaces that face the opening and closing bar for tapping contain a reverse tapered cross section. [Reference numerals] (AA) Start; (BB) End; (S210) Charging silicone; (S220) Inductive heating; (S230) Spraying gas; (S240) Collecting; (S250) Washing