发明名称 Imaging optical system and related installation and method
摘要 An imaging optical system can image two object fields, each in the same object plane, into two corresponding image fields, each in the same image plane. The two object fields are spatially separated from each another, and the two image fields are spatially separated from each other. The imaging optical system can exhibit increased flexibility of use.
申请公布号 US8558991(B2) 申请公布日期 2013.10.15
申请号 US20100758530 申请日期 2010.04.12
申请人 MANN HANS-JUERGEN;CARL ZEISS SMT GMBH 发明人 MANN HANS-JUERGEN
分类号 G03B27/54;B81C99/00 主分类号 G03B27/54
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