SELECTIVE EMITTER SOLAR CELLS AND FABRICATION METHOD USING ACID SOLUTION PROTECTION LAYER

摘要

PURPOSE: A method for forming a selective emitter layer using an etchant protecting layer is provided to prevent the selective emitter layer from being damaged by performing a wet-etching process. CONSTITUTION: A first conductive substrate is prepared (S10). A second conductive emitter layer is formed on the upper surface of the first conductive substrate (S20). An etchant protecting layer is patterned and deposited on the second conductive emitter layer (S30). The second conductive emitter layer is selectively wet-etched (S40). The etchant protecting layer is removed from the surface of the first conductive substrate (S50). [Reference numerals] (S10) Step where a first conductive substrate is prepared; (S20) Step where a second conductive emitter layer is formed on the upper surface of the first conductive substrate using an impurity with an opposite type of the first conductive substrate through an ion injection & diffusion process; (S30) Step where an etchant protecting layer is patterned and deposited on the second conductive emitter layer; (S40) Step where the second conductive emitter layer is selectively wet-etched with a wet etchant; (S50) Step where the etchant protecting layer is removed; (S60) Step where an anti-reflection layer is formed on the surface of the substrate; (S70) Step where electrodes are formed on the highly-doped emitter layer and the back of the substrate