| 摘要 |
<p>PURPOSE: An X-ray tomography apparatus is provided to separate a characteristics X-ray desired to be incident on a sample from the X-ray that an X-ray source is generated and simultaneously widen the inspection range of the characteristics X-ray that is incident on the sample and performs the diffraction. CONSTITUTION: An X-ray tomography apparatus (1) includes an X-ray source (2), an optical system (4), and an X-ray detector (6). The X-ray source irradiates the X-ray including the predetermined characteristics X-ray from a micro-focus. The optical system includes a multiple-layers mirror (3) which corresponds to the predetermined characteristics X-ray and is at inclined lattice plane intervals, and causes the X-ray reflected by the multiple-layers mirror to be incident on a sample. The X-ray detector detects a diffraction X-ray generated from the sample. The multiple-layers mirror has a curved reflection surface with a parabolic cross-section. The micro-focus of the X-ray source is arranged in the curved reflection surface.</p> |
