SUBSTRATE MOUNTING POSITION CORRECTING APPARATUS AND SUBSTRATE MOUNTING POSITION CORRECTING METHOD

摘要

The present invention is provided with: a suction bar, which has a suction surface, and is disposed between substrate plates; a clamp disposed to face the suction surface with each of the substrate plates therebetween; a moving apparatus, which moves the suction bar and the clamp such that the substrate mounting position of a boat is at a specified position previously set for the purpose of mounting the substrate, in a state wherein each of the substrate plates is sandwiched between the suction bar and the clamp, which are in contact with the first and second main surfaces, respectively, and each of the substrate plates is sucked to the suction surface; and a suction apparatus, which sucks each of the substrate plates to the suction surface.