ION BEAM MEASURING DEVICE, ION BEAM MEASURING METHOD, AND ION IMPLANTATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide contactless ion beam measurement.SOLUTION: An ion beam measuring device 10 includes an irradiation portion 20 which irradiates an ion beam 11 with a measurement electromagnetic wave 12, and a detection portion 30 which detects a scattered electromagnetic wave generated by elastic scattering of the measurement electromagnetic wave 12 by charged particles in the ion beam 11. The measurement electromagnetic wave 12 may be made incident obliquely on the ion beam 11. The elastic scattering of the measurement electromagnetic wave 12 may include Rayleigh scattering or Thomson scattering.