| 摘要 |
PROBLEM TO BE SOLVED: To accurately measure the temperature of a measuring object which is moved while being taken up by a roll-to-roll process.SOLUTION: A plasma treatment position A on a film-like substrate 15 is irradiated with SC light by a temperature sensor probe 14A, and a wavenumber spectrum of the reflection light thereof is measured. An interference waveform is determined by performing inverse Fourier transform on the wavenumber spectrum. An optical path length of the film-like substrate 15 in the position A is calculated from the interference waveform. Furthermore, a position B just before the plasma treatment position on the film-like substrate 15 is irradiated with SC light by a temperature sensor probe 14B, and an optical path length of the film-like substrate 15 in the position B is calculated similarly. By using the two optical path lengths calculated as such, a temperature of the film-like substrate 15 in the position A can be measured accurately. |
