SEMICONDUCTOR DEVICES INCLUDING CONTACTS WHICH HAVE ENLARGED CONTACT AREAS WITH ACTIVES AND METHODS FOR FABRICATING THE SAME

摘要

PURPOSE: A semiconductor device including an active region and a contact with an enlarged contact area and a manufacturing method thereof prevent defects caused by pattern misalignment due to high integration. CONSTITUTION: A substrate (101) includes an element isolation film (105) defining a first junction region (11) and a second junction (12). A word line is buried in the substrate. A bit line (141) intersects with the word line on the word line. A first contact (135) is disposed between the substrate and the bit line and is electrically connected to the first junction region. A storage node contact hole is filled with a conductor and a second contact (157) is in contact with the second region.