发明名称 MULTIVARIATE MONITORING OF A BATCH MANUFACTURING PROCESS
摘要 A method, controller, and system for monitoring a manufacturing process are described. Measured values of multiple variables, including dependent variables, manipulated variables, or both, are received. Future values of the manipulated variables, future values of the dependent variables, or both, are predicted. A multivariate analysis is performed on a combination of (1) the measured values of the variables and (2) the future values of the manipulated variables, the future values of the dependent variables, or both, to generate multivariate statistics.
申请公布号 WO2013152345(A1) 申请公布日期 2013.10.10
申请号 WO2013US35595 申请日期 2013.04.08
申请人 MKS INSTRUMENTS, INC. 发明人 MCCREADY, CHRISTOPHER, PETER
分类号 G05B23/00 主分类号 G05B23/00
代理机构 代理人
主权项
地址