发明名称 SOLID-STATE IMAGING DEVICE AND MANUFACTURING METHOD OF SOLID-STATE IMAGING DEVICE
摘要 A solid-state imaging device according to embodiments of the present disclosure includes a light receiving unit, a first charge holding film, and a second charge holding film. The light receiving unit converts the incident light to an electric current. The first charge holding film is formed above the light receiving unit and holds electric charges. The second charge holding film is formed on the first charge holding film and holds electric charges. Further, concentration of oxygen in the second charge holding film is higher than concentration of oxygen in the first charge holding film.
申请公布号 US2013264670(A1) 申请公布日期 2013.10.10
申请号 US201313787746 申请日期 2013.03.06
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KAMIMURA MASAKI;UYA SHINJI;KUDO TOMOYASU
分类号 H01L31/02;H01L31/18 主分类号 H01L31/02
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