发明名称 |
BUILT-IN SELF-TEST METHOD AND STRUCTURE |
摘要 |
A method of testing a semiconductor wafer and a related structure. In various embodiments, a method includes: placing a probe on a first chip on the semiconductor wafer; testing a scribe line automatic built-in self-test (ABIST) for the first chip to search for a fault; progressively testing a subsequent scribe line ABIST for a subsequent chip on the semiconductor wafer in response to determining the ABIST for the first chip does not indicate the fault; moving the probe point to the subsequent chip and retesting the subsequent scribe line ABIST in response to determining the ABIST for the subsequent chip indicates a fault; and testing a further subsequent scribe line ABIST for a further subsequent chip on the semiconductor wafer in response to determining the retesting of the subsequent scribiline ABIST does not indicate a fault in the subsequent scribe line ABIST.
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申请公布号 |
US2013265068(A1) |
申请公布日期 |
2013.10.10 |
申请号 |
US201213443450 |
申请日期 |
2012.04.10 |
申请人 |
AMOAH YOBA;ELLIS-MONAGHAN JOHN J.;KUO ROGER C.;LEITCH MOLLY J.;ZHANG ZHIHONG;INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
AMOAH YOBA;ELLIS-MONAGHAN JOHN J.;KUO ROGER C.;LEITCH MOLLY J.;ZHANG ZHIHONG |
分类号 |
G01R31/3187 |
主分类号 |
G01R31/3187 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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