发明名称 |
ATMOSPHERIC PRESSURE PLASMA DEVICE USING STRIP ELECTRODE ARRAYS |
摘要 |
PURPOSE: An atmospheric pressure plasma projection device using an electrode arrangement of small line width is provided to have a projection range of a wide area. CONSTITUTION: An upper substrate (22) and a lower substrate (20) have a strip electrode (23) formed on a surface which gas flows. A partition maintaining layer (21) is located between the upper substrate and the lower substrate. The partition maintaining layer makes a gas passage. An external ground electrode (24) is located on the outside of the upper substrate and the lower substrate. The external ground electrode controls discharge according to an angle with a direction of a radiation surface. |
申请公布号 |
KR20130110391(A) |
申请公布日期 |
2013.10.10 |
申请号 |
KR20120032331 |
申请日期 |
2012.03.29 |
申请人 |
PUSAN NATIONAL UNIVERSITY INDUSTRY-UNIVERSITY COOPERATION FOUNDATION |
发明人 |
LEE, HAE JUNE;LEE, YOUNG HO;LEE, HO JUN;HA, CHANG SEUNG |
分类号 |
H05H1/46;H01J37/32;H01L21/3065 |
主分类号 |
H05H1/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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