PROJECTION EXPOSURE APPARATUS WITH AT LEAST ONE MANIPULATOR

摘要

PURPOSE: A projection exposure apparatus including at least one manipulator is provided to secure a correct imaging by including a projection lens with a small wavefront aberration. CONSTITUTION: A projection lens (22) has a plurality of optical elements. The optical elements are formed for imaging a mask structure on a substrate. At least one manipulator changes at least one optical effect among the optical elements. An algorithm generator (42) generates an optimization algorithm (52) for producing a travel. A travel establishing device (44) establishes at least one travel.