MANUFACTURING METHOD OF SEMICONDUCTOR LIGHT EMITTING DEVICE HAVING A WAVELENGTH CONVERSION LAYER

摘要

PURPOSE: A method of manufacturing a semiconductor light emitting device including a wavelength conversion layer improves the color distribution of the light emitting device manufactured from a substrate by leveling the rear surface of the substrate before the wavelength conversion layer is formed. CONSTITUTION: A wafer (11) in which a semiconductor laminate (15) is formed is provided. Multiple electrodes (16) are formed on the semiconductor laminate. The lower surface of the wafer is polished by using a polishing device (G1). A structure with a specific height is formed on the electrodes. A wavelength conversion layer composed of resin containing wavelength conversion materials is formed on the semiconductor laminate. The wavelength conversion layer is polished to expose the structure.