| 摘要 |
PROBLEM TO BE SOLVED: To provide a jointing device capable of applying a sufficient pressure between electrodes even when shapes of a substrate and a substrate support section are not uniform.SOLUTION: A jointing device 1 comprises: a substrate support section 10 having a flat support face 11 supporting the other face 210b of a first substrate 210; a pressing member 15 formed into a spherical shape; a pressing support section 20 for supporting the pressing member rotatably around an axial line parallel to a first direction and an axial line parallel to a second direction when a first direction X and a second direction Y parallel to the support face and crossing with each other are defined; a pressing section 25 for pressing the pressing support section toward the substrate support section; a movement section for moving the pressing support section in the first and second directions respectively; and a control section for controlling movement of the pressing support section due to the movement section. The control section moves the pressing support section so that a dot-like region R1 in which the pressing member presses a second face 220b of a second substrate when seen in an orthogonal direction Z orthogonal to the support face scans in a range in which a first electrode and a second electrode are overlaid on each other. |
