发明名称
摘要 The present invention provides an ultraviolet ray irradiator which irradiates ultraviolet ray without conveying complication or damage to plate-shaped object and cutting blade. The ultraviolet ray irradiator irradiates ultraviolet ray to a plate-shaped object unit which is adhibited with the plate-shaped object on an ultraviolet solidification type carrier belt for solidifying the adhesive of the carrier belt. The peripheral part of the carrier belt is equipped to an annular frame. The ultraviolet ray irradiator comprises the following components: a box which can receive a plurality of plate-shaped object units; a supporting part which supports the plate-shaped object units; an ultraviolet ray irradiation unit which irradiates ultraviolet ray from a back surface of a plate-shaped object adhesion surface of the plate-shaped object unit to the carrier belt; a conveying unit which conveys the plate-shaped object units from the box to the supporting part and conveys the plate-shaped object unit from the supporting part after ultraviolet ray irradiation; a mask which is provided with an opening with an expected size for allowing the passing-through of the ultraviolet ray and shields the ultraviolet ray outside the opening; and a positioning unit which selectively positions the mask between the plate-shaped object unit and the ultraviolet ray irradiation unit, wherein when the mask is positioned between the plate-shaped object unit and the ultraviolet ray irradiation nit, the ultraviolet ray irradiation unit irradiates ultraviolet ray to the carrier belt through the opening.
申请公布号 JP5312997(B2) 申请公布日期 2013.10.09
申请号 JP20090065403 申请日期 2009.03.18
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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