发明名称
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method for a light-emitting element capable of restraining reduction in light-emitting efficiency. SOLUTION: The manufacturing method for a light-emitting element is a manufacturing method for a laminated substrate wherein a first pattern layer made from a first material and a second pattern layer made from a second material are formed on a substrate. The manufacturing method for a light-emitting element has a first material layer formation process of forming a first material layer made of the first material on the substrate, a resist pattern formation process of forming a resist pattern on the first material layer, a first pattern layer formation process of etching the first material layer by using the resist pattern as a mask and forming the first pattern layer, a second pattern layer formation process of forming the second pattern layer at an etched section of the first material layer on the substrate by depositing a second material layer made of the second material on the substrate where the first pattern layer is formed by using the resist pattern as a mask, and a resist removal process of removing the resist pattern. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP5313769(B2) 申请公布日期 2013.10.09
申请号 JP20090129748 申请日期 2009.05.29
申请人 发明人
分类号 H05B33/10;H01L51/50;H05B33/12;H05B33/22 主分类号 H05B33/10
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