发明名称 |
Motion detection using capacitor having different work function materials |
摘要 |
An apparatus for detecting mechanical displacement in a micro-electromechanical system includes a capacitor having first and second plates spaced from one another, the first and second plates having different work functions and being electrically connected with each other. The capacitor plates are movable with respect to one another such that a spacing between the plates changes in response to a force. A current through the capacitor represents a rate of change in the spacing between the plates at a given time.
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申请公布号 |
US8549922(B2) |
申请公布日期 |
2013.10.08 |
申请号 |
US20100720813 |
申请日期 |
2010.03.10 |
申请人 |
KALNITSKY ALEXANDER;HSUEH FU-LUNG;TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
KALNITSKY ALEXANDER;HSUEH FU-LUNG |
分类号 |
G01P15/125 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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