ARTICLE STORAGE FACILITY AND ARTICLE TRANSPORT FACILITY

摘要

PURPOSE: An article storage facility and an article transport facility quickly perform receiving and shipping operations of a semiconductor wafer and a reticle and simplify the configuration of a transport device for receiving and shipping. CONSTITUTION: A storage shelf (1) stores a semiconductor wafer and a reticle. The storage shelf includes a first storage part storing a wafer storage container (W) and a second storage part storing a reticle storage container (R). A transport device (2) for receiving and shipping includes a flange part (13C) supporting a grip part and the reticle storage container. The grip part grips a top flange (10) and supports the wafer storage container. A guide rail (18) guides a platform and a balance weight to move vertically.