| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor device that is provided with an oscillator formed on a semiconductor substrate and having high frequency accuracy.SOLUTION: A semiconductor device includes: a semiconductor substrate; an acoustic resonator formed on the semiconductor substrate, including a semiconductor layer containing an impurity, and resonating with a predetermined resonant frequency by an acoustic standing wave activated by the semiconductor layer; a temperature detection part formed on the semiconductor substrate and detecting the temperature of the semiconductor substrate; a calculation part formed on the semiconductor substrate and performing the calculation of the temperature compensation on the basis of the temperature detected by the temperature detection part, a type of impurity and a concentration of the impurity; and a control part formed on the semiconductor substrate and controlling the resonant frequency on the basis of the calculation result by the calculation part. |
