发明名称 |
STRUCTURE FORMING APPARATUS, STRUCTURE MANUFACTURING METHOD, AND STRUCTURE |
摘要 |
PROBLEM TO BE SOLVED: To provide: a structure forming apparatus and a structure manufacturing method which are capable of forming a structure without damaging a pattern regardless of the pattern shape of the structure; and a structure manufactured with these.SOLUTION: A structure forming apparatus includes a rotary body, a holding member, and an irradiation unit. The rotary body is configured to allow a mask subjected to patterning to be disposed thereon. The irradiation unit is capable of irradiating an area along an axis direction of a rotation of the rotary body with an energy line via the mask. The holding member is opposed to the rotary body such that a holding area that holds a material cured with the energy line is formed. |
申请公布号 |
JP2013207060(A) |
申请公布日期 |
2013.10.07 |
申请号 |
JP20120073796 |
申请日期 |
2012.03.28 |
申请人 |
SONY CORP |
发明人 |
YASUKOCHI HIROYUKI |
分类号 |
H01L21/027;B29C59/04;F16C13/00;G03F7/24 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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