发明名称 STRUCTURE FORMING APPARATUS, STRUCTURE MANUFACTURING METHOD, AND STRUCTURE
摘要 PROBLEM TO BE SOLVED: To provide: a structure forming apparatus and a structure manufacturing method which are capable of forming a structure without damaging a pattern regardless of the pattern shape of the structure; and a structure manufactured with these.SOLUTION: A structure forming apparatus includes a rotary body, a holding member, and an irradiation unit. The rotary body is configured to allow a mask subjected to patterning to be disposed thereon. The irradiation unit is capable of irradiating an area along an axis direction of a rotation of the rotary body with an energy line via the mask. The holding member is opposed to the rotary body such that a holding area that holds a material cured with the energy line is formed.
申请公布号 JP2013207060(A) 申请公布日期 2013.10.07
申请号 JP20120073796 申请日期 2012.03.28
申请人 SONY CORP 发明人 YASUKOCHI HIROYUKI
分类号 H01L21/027;B29C59/04;F16C13/00;G03F7/24 主分类号 H01L21/027
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