| 摘要 |
PROBLEM TO BE SOLVED: To provide thermal treatment equipment capable of efficiently cooling a substrate in a heated state only by air cooling while having a relatively simple constitution.SOLUTION: A housing part of thermal treatment equipment in which a substrate is cooled by allowing atmospheric gas from the outside to flow in the housing part housing the substrate includes: a plurality of support pins for horizontally supporting the substrate; an opening through which the atmospheric gas flows in from the outside in the horizontal direction; an exhaust port provided at a position facing the opening and used for exhausting the atmospheric gas; and flow velocity distribution imparting means generating a flow velocity distribution, in which flow velocity is higher on a side where the exhaust port is provided than on a side of the opening, in the flow of the atmospheric gas on at least the lower side of the substrate, when the substrate is horizontally supported by the support pins and cooled by the atmospheric gas. |
