DEFECT DETECTION APPARATUS

摘要

PROBLEM TO BE SOLVED: To suitably detect defects of wiring on a substrate.SOLUTION: An infrared camera 4 is attached to a beam section 12c of a gantry 12, the beam section being disposed across an alignment stage 11 having a mother board 1 placed thereon, such that the relative position with respect to the board surface of the mother board 1 placed on the alignment stage 11 is fixed in the direction perpendicular to the board surface.