发明名称 PRODUCTION METHOD, TRANSFER METHOD AND DAMAGE DETECTION METHOD OF GLASS PLATE
摘要 PROBLEM TO BE SOLVED: To detect contact of a device for transferring a glass plate while floating, and the glass plate over the entire surface thereof.SOLUTION: In a process for transferring a glass plate by using a device for floating the glass plate by blowing gas to the lower surface thereof, contact of the glass plate and the device is determined by detecting an elastic wave generated by contact. The method of detecting damage of a glass plate includes a step for setting a threshold in one or more types of information selected from the frequency, amplitude, waveform, generation time and generation interval of an elastic wave generated upon occurrence of damage on the glass plate, and a step for determining damage by comparing the information, extracted by detecting an elastic wave, with a threshold.
申请公布号 JP2013207106(A) 申请公布日期 2013.10.07
申请号 JP20120075032 申请日期 2012.03.28
申请人 AVANSTRATE INC 发明人 ISE HIRONORI;IGAI OSAMU;FUKUSHIMA TATSUYA
分类号 H01L21/677;B65G49/06 主分类号 H01L21/677
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