| 摘要 |
PURPOSE: A manufacturing method of an antistatic polymer film is provided to obtain excellent antistatic performance for a polymer film by changing surface resistance without sparks which damages to the surface of the polymer film. CONSTITUTION: A manufacturing method of an antistatic polymer film comprises: a step of placing a polymer film and a conductive gird target(140) inside a vacuum chamber; a step of forming plasma near the polymer film and the target; a step of applying pulse voltage to the target to emit the atoms or molecules of the target by the collision of plasma ions and the target; and a step of restoring the pulse voltage back to the original state to inject the emitted atoms or molecules into the surface of the polymer film. |
