| 摘要 |
A wide band gap, heterojunction photovoltaic material comprises a bulk layer, a high-resistivity layer and a microcrystalline silicon carbide layer. The heterojunction semiconductor material is formed by heating a single-piece semiconductor material to form a high-resistivity layer over a bulk layer, the high-resistivity layer having SiC seed crystals at the top surface. A layer of SiC is sputtered over the high-resistivity layer, and the structure is annealed. The annealing and the SiC seed crystals causes the sputtered SiC layer to convert into a microcrystalline beta-SiC layer. When the layer of SiC is sputtered using a p-type SiC target, a p-type SiC layer is formed over the high-resistivity layer. The heterojunction material may exhibit photovoltaic properties. Applications include forming a photovoltaic device with the heterojunction material. |
