发明名称 SOLID STATE IMAGE SENSOR AND MANUFACTURING METHOD THEREFOR
摘要 PROBLEM TO BE SOLVED: To provide a solid state image sensor the data accuracy of which is high at a point detecting visible light and a point detecting infrared light, without degrading resolution in both horizontal and vertical directions, and to provide a manufacturing method therefor.SOLUTION: The solid state image sensor includes a visible light detector (visible light detection layer 2) and an infrared detector (diaphragm 20, bolometer film 15) arranged two-dimensionally and periodically for a substrate 1, and a signal read circuit provided in the substrate 1 and outputting the signals of the visible light detector (visible light detection layer 2) and infrared detector (diaphragm 20, bolometer film 15) as a time series signal to the outside. The visible light detector (visible light detection layer 2) and infrared detector (diaphragm 20, bolometer film 15) are arranged on the same optical axis while overlapping in the vertical direction for the substrate 1.
申请公布号 JP2013201291(A) 申请公布日期 2013.10.03
申请号 JP20120068674 申请日期 2012.03.26
申请人 NEC CORP 发明人 TOYAMA SHIGERU
分类号 H01L27/146;G01J1/02;H01L27/144;H04N5/33;H04N5/369 主分类号 H01L27/146
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