发明名称 IMPROVED OPTICAL SCANNING PROBE
摘要 The present invention relates to a scanning probe (100) for the dimensional acquisition of an object (400) by irradiating the object (400) with light and detecting reflected light comprising: a detection unit (120) comprising an imaging sensor (122) and a sensor lens assembly (124) for detecting the reflected light, a light projecting unit (141 ) comprising a light source (142) for generating light, and source optics (145) for focusing the light, and light plane generating optics (143) for generating a light plane (149) for irradiating the object, and an adjustment mechanism (155) comprised in the light projecting unit (141 ), for adjusting the position or orientation of the light plane relative to the detection unit. It further relates to a method for assembly of a scanning probe (100).
申请公布号 WO2013144293(A1) 申请公布日期 2013.10.03
申请号 WO2013EP56700 申请日期 2013.03.28
申请人 NIKON METROLOGY NV 发明人 BLANCKAERT, PATRICK;THYS, FRANK;NYSEN, RAF;VANDENHOUDT, GEERT
分类号 G01B11/06;G01B11/25 主分类号 G01B11/06
代理机构 代理人
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