发明名称 |
SEMICONDUCTOR STORAGE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To reduce an occupied area of a guard ring in a semiconductor chip.SOLUTION: A semiconductor storage device comprises: an edge seal ES composed of a double-layered structure of a crack stopper SK and a guard ring GR1 inside the crack stopper SK, which is formed along a circumference of a semiconductor chip P; word-line selection transistor groups WSB arranged adjacent to the guard ring GR1; and a guard ring GR3 formed in the semiconductor chip P so as to surround the word-line selection transistor group WSB together with the guard ring GR1. |
申请公布号 |
JP2013201293(A) |
申请公布日期 |
2013.10.03 |
申请号 |
JP20120068768 |
申请日期 |
2012.03.26 |
申请人 |
TOSHIBA CORP |
发明人 |
KAJITANI YASUYUKI;HISADA TOSHIKI;MAEKAWA HIDEAKI |
分类号 |
H01L21/8247;H01L21/3205;H01L21/336;H01L21/768;H01L21/822;H01L23/522;H01L27/04;H01L27/10;H01L27/115;H01L29/788;H01L29/792 |
主分类号 |
H01L21/8247 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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