发明名称 SEMICONDUCTOR STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To reduce an occupied area of a guard ring in a semiconductor chip.SOLUTION: A semiconductor storage device comprises: an edge seal ES composed of a double-layered structure of a crack stopper SK and a guard ring GR1 inside the crack stopper SK, which is formed along a circumference of a semiconductor chip P; word-line selection transistor groups WSB arranged adjacent to the guard ring GR1; and a guard ring GR3 formed in the semiconductor chip P so as to surround the word-line selection transistor group WSB together with the guard ring GR1.
申请公布号 JP2013201293(A) 申请公布日期 2013.10.03
申请号 JP20120068768 申请日期 2012.03.26
申请人 TOSHIBA CORP 发明人 KAJITANI YASUYUKI;HISADA TOSHIKI;MAEKAWA HIDEAKI
分类号 H01L21/8247;H01L21/3205;H01L21/336;H01L21/768;H01L21/822;H01L23/522;H01L27/04;H01L27/10;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L21/8247
代理机构 代理人
主权项
地址