发明名称 SHALLOW VIA FORMATION BY OXIDATION
摘要 A method, and an apparatus formed thereby, to construct shallow recessed wells on top of exposed conductive vias on the surface of a semiconductor. The shallow recessed wells are subsequently filled with a conductive cap layer, such as a tantalum nitride (TaN) layer, to prevent or reduce oxidation which may otherwise occur naturally when exposed to air, or possibly occur during an under-bump metallization process.
申请公布号 US2013256890(A1) 申请公布日期 2013.10.03
申请号 US201213435918 申请日期 2012.03.30
申请人 HUANG LIN-YA;JUAN CHI-SHENG;TSENG CHIEN-LIN;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 HUANG LIN-YA;JUAN CHI-SHENG;TSENG CHIEN-LIN
分类号 H01L23/48;H01L21/28 主分类号 H01L23/48
代理机构 代理人
主权项
地址