发明名称 SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To improve characteristics of different kinds of elements together, which are formed on the same substrate.SOLUTION: A semiconductor device according to an embodiment comprises: a first semiconductor layer of a first conductivity type which has first and second surfaces; and a second semiconductor layer of a second conductivity type and a third semiconductor layer of the first conductivity type, which are formed on the second surface side of the first semiconductor layer to be adjacent to each other; a fourth semiconductor layer of the second conductivity type which is formed on the first surface side so as to be opposite to the second semiconductor layer; a fifth semiconductor layer of the first conductivity type which is formed on a surface of the fourth semiconductor layer; a sixth semiconductor layer of the second conductivity type which is formed on the first surface side so as to be opposite to the third semiconductor layer; and a gate electrode formed in a first trench which pierces the fourth semiconductor layer. A depth of a bottom face of the sixth semiconductor layer is deeper than a depth of a bottom face of the fourth semiconductor layer. A distance between the bottom face of the sixth semiconductor layer and the second surface of the first semiconductor layer is shorter than a distance between a bottom face of the fourth semiconductor layer and the second surface of the first semiconductor layer.
申请公布号 JP2013201237(A) 申请公布日期 2013.10.03
申请号 JP20120068090 申请日期 2012.03.23
申请人 TOSHIBA CORP 发明人 SUESHIRO TOMOKO;OGURA TSUNEO;NINOMIYA HIDEAKI
分类号 H01L27/04;H01L21/76;H01L29/739;H01L29/78;H01L29/861;H01L29/868 主分类号 H01L27/04
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