发明名称 IN-LINE APPARATUS FOR DEVELOPING AND METHOD OF FABRICATING LIQUID CRYSTAL DISPLAY DEVICE USING THEREOF
摘要 PURPOSE: In-line development equipment and a method for manufacturing a liquid crystal display device using the same are provided to simplify a manufacturing process and to remove the residue of developing solution. CONSTITUTION: A chemical supply unit(310) spreads developing solution on the surface of a substrate. A shower unit(250) removes the residue of the developing solution. A developing room(320) develops the substrate. A cleaning unit removes the used developing solution.
申请公布号 KR101313656(B1) 申请公布日期 2013.10.02
申请号 KR20110086758 申请日期 2011.08.29
申请人 发明人
分类号 G02F1/13;H01L21/027 主分类号 G02F1/13
代理机构 代理人
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