发明名称 FORMED BODY, PRODUCTION METHOD THEREOF, ELECTRONIC DEVICE MEMBER AND ELECTRONIC DEVICE
摘要 <p>The present invention is a formed article sequentially including a base layer, a primer layer, and a gas barrier layer, the primer layer being formed of a material that includes at least a carbon atom, an oxygen atom, and a silicon atom, and is characterized in that a peak position of binding energy of 2p electrons of the silicon atom as determined by X-ray photoelectron spectroscopy (XPS) is 101.5 to 104 eV, and the gas barrier layer (I) being a layer obtained by implanting ions into a polymer layer that includes at least one compound selected from a group consisting of a polysilazane compound, a polyorganosiloxane compound, a polycarbosilane compound, and a polysilane compound, or (II) being formed of a material that includes at least an oxygen atom and a silicon atom, a surface layer part of the gas barrier layer having an oxygen atom content rate of 60 to 75%, a nitrogen atom content rate of 0 to 10%, and a silicon atom content rate of 25 to 35%, based on a total content rate of oxygen atoms, nitrogen atoms, and silicon atoms, and the surface layer part of the gas barrier layer having a film density of 2.4 to 4.0 g/cm 3 . Also provided are a method for forming the same, an electronic device member including the formed article, and an electronic device including the electronic device member.</p>
申请公布号 KR20130107283(A) 申请公布日期 2013.10.01
申请号 KR20137007079 申请日期 2011.09.20
申请人 LINTEC CORPORATION 发明人 SUZUKI YUTA;KONDO TAKESHI
分类号 B32B27/06;C23C14/48;G02F1/1333;H01L21/265 主分类号 B32B27/06
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