发明名称 Non-volatile memory device and manufacturing method thereof
摘要 According to one embodiment, a non-volatile memory device is formed as described below. First, a wiring material layer, which configures a part of a wiring of an element, is stacked above an element layer, the wiring material layer is processed in a predetermined shape, and the element layer is etched using the wiring material layer as a mask. Next, an insulation layer is embedded between etched patterns, and the insulation layer is removed using the wiring material layer as a stopper. Then, a wiring layer, which is in contact with the wiring material layer, is formed on the insulation layer from which the wiring material layer is exposed.
申请公布号 US8546196(B2) 申请公布日期 2013.10.01
申请号 US201113018722 申请日期 2011.02.01
申请人 KUNIYA TAKUJI;NODA KOTARO;KABUSHIKI KAISHA TOSHIBA 发明人 KUNIYA TAKUJI;NODA KOTARO
分类号 H01L21/768;G11C11/21 主分类号 H01L21/768
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