| 摘要 |
An apparatus for forming minute patterns is provided to economize material cost and increase productivity by safely separating a substrate and a stamp, which are bonded together, from each other and preventing deformation or a crack of the substrate and the stamp. An apparatus for forming minute patterns comprises the first chamber(100), the second chamber(200), a pressure adjustment part(400), and a substrate fixing module(110). The first chamber, at which a stamp carved with minute patterns is installed, forms the first space with the stamp(20). The second chamber, at which a photoresist-applied substrate is mounted, forms the second space with the stamp as the second chamber is combined with the first chamber. In order to pressurize the stamp and imprint the minute patterns, the pressure adjustment part adjusts the pressure of the first and second spaces so that the pressure of the first space can act toward the second space. The substrate fixing module fixes the substrate mounted at the second chamber. |
