发明名称 NANO-PATTERNING APPARATUS, NANO-PATTERNING SYSTEM HAVING THE SAME AND CONTROL METHOD THEREOF
摘要 PROBLEM TO BE SOLVED: To provide a nano-patterning apparatus in which mass-production of an electronic component with which a nano-pattern is formed can be performed and the nano-pattern comprised of solder paste or conductive paste can be formed easily in accordance with preset information, a nano-patterning system having the same and a control method thereof.SOLUTION: A nano-patterning apparatus 200 comprises a holder unit 210 including a transfer unit 211 and an insulating unit 212, a tip unit 220 inserted into the holder unit 210, downwardly protruded and having a flow channel, a flow path 230 having one end connected to the flow channel through one side of the transfer unit 211 or the insulating unit 212 and extending to the outside to serve as a movement path allowing a nano-patterning material 251 to move therealong, a pressing unit 240 pressing the nano-patterning material 251 at one side of the flow path 230, and a storage unit 250 connected to the other end of the flow path 230 and storing the nano-patterning material 251.
申请公布号 JP2013197580(A) 申请公布日期 2013.09.30
申请号 JP20120118774 申请日期 2012.05.24
申请人 SAMSUNG ELECTRO-MECHANICS CO LTD 发明人 MYOUNG SEON YOUNG;LEE YOUNG JU;KIM YUN BOG;HAM SHOK JIN;PARK JON-CHAN;LEE HYUN JUNG
分类号 H05K3/10;B05C5/00;B23K3/00;B23K3/04;B23K3/06;B23K101/42;H05K3/28 主分类号 H05K3/10
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